Modern Electronic Materials 7

In this issue

Papers published: 5

Total pages: 46

Unique views: 16594

Total views: 25218

open access

Issue cover: PDF

Go to issue

Issue 7(2)

Next »

Modern Electronic Materials 7(2)

Epitaxial layers and multilayered compositions

Select: All None

Download:

Citation

XML

PDF

Effect of PECVD SiNx deposition process ...

Research Article

Effect of PECVD SiN_x deposition process parameters on electrical properties of SiN_x/AlGaN/GaN structures

Kira L. Enisherlova, Lev A. Seidman, Ella M. Temper, Yuliy A. Kontsevoy

Part of: Epitaxial layers and multilayered compositions

10.3897/j.moem.7.2.73293

30-06-2021

Unique: 3098 | Total: 4437

Reprint: € 6,00

63-71

This website uses cookies in order to improve your web experience. Read our Cookies Policy

OK

web
statistics