In this issue

Papers published: 5

Total pages: 46

Unique views: 13927

Total views: 21667

open access
Issue cover: PDF

Go to issue

« Previous
Issue 7(2)
 Next »
Issue No
from 4 to 11
Number No
Modern Electronic Materials 7(2) (2021)
Sort by:
Epitaxial layers and multilayered compositions
Select:   All   None
Download:
Citation
XML
PDF
Export format

Download
Effect ...
Research Article
Effect of PECVD SiNx deposition process parameters on electrical properties of SiNx/AlGaN/GaN structures
Kira L. Enisherlova, Lev A. Seidman, Ella M. Temper, Yuliy A. Kontsevoy
Part of: Epitaxial layers and multilayered compositions
10.3897/j.moem.7.2.73293
 30-06-2021
 Unique: 2604 | Total: 3832  | Access Period:
 Reprint: € 6,00
 63-71
HTML
XML
PDF

This website uses cookies in order to improve your web experience. Read our Cookies Policy

OK