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Modern Electronic Materials 7(2) (2021)
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Epitaxial layers and multilayered compositions
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Research Article
Effect of PECVD SiNx deposition process parameters on electrical properties of SiNx/AlGaN/GaN structures
Kira L. Enisherlova, Lev A. Seidman, Ella M. Temper, Yuliy A. Kontsevoy
Part of: Epitaxial layers and multilayered compositions
10.3897/j.moem.7.2.73293
 30-06-2021
 Unique: 757 | Total: 1281  | Access Period:
 Reprint: € 3,60
 63-71
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