K. L. Еnisherlova, L. A. Seidman, S. Yu. Bogolyubova (2022)
Effect of treatment in nitrogen plasma on the electrical parameters of AlGaN/GaN heterostructures.
Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering25: 227.
DOI: 10.17073/1609-3577-2022-3-227-237
K. L. Enisherlova, L. A. Seidman, S. Yu. Bogolyubova (2022)
Effect of Treatment in Nitrogen Plasma on the Electrical Parameters of AlGaN/GaN Heterostructures.
Russian Microelectronics51: 686.
DOI: 10.1134/S1063739722080133
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