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Modern Electronic Materials 5(3) (2019)
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Atomic structures and structural study methods
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Research Article
Regularities of microdefect formation in silicon during heat treatment for internal getter synthesis
Vladimir T. Bublik,     Marina I. Voronova,     Kirill D. Shcherbachev, Mikhail V. Mezhennyi, Vladimir Ya. Reznik
Part of: Atomic structures and structural study methods
10.3897/j.moem.5.52812
 12-09-2019
 Unique: 1091 | Total: 1648  | Access Period:
 Reprint: € 5,10
 133-139
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Short Communication
Study of the effect of local photon annealing on stress in silicon wafers
Vitaliy V. Starkov, Ekaterina A. Gosteva, Dmitry V. Irzhak, Dmitry V. Roshchupkin
Part of: Atomic structures and structural study methods
10.3897/j.moem.5.52500
 12-09-2019
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 141-144
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