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Author

Sergey Yu. Yurchuk

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Research Article

Coordinate dependent diffusion analysis of phosphorus diffusion profiles in gallium doped germanium

Svetlana P. Kobeleva, Ilya M. Anfimov, Andrei V. Turutin, Sergey Yu. Yurchuk, Vladimir M. Fomin

10.3897/j.moem.4.3.39536

01-09-2018

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113-117

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