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Nikolai V. Batrameev
1 article by this author
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Research Article
Synthesis of silicon-carbon films by induction-assisted plasma-chemical deposition
Alexander A. Temirov
,
Ilya V. Kubasov
,
Andrei V. Turutin
,
Tatiana S. Ilina
,
Alexander M. Kislyuk
,
Dmitry A. Kiselev
,
Elena A. Skryleva
,
Nikolai A. Sobolev
,
Igor A. Salimon
,
Nikolai V. Batrameev
,
Mikhail D. Malinkovich
,
Yuri N. Parkhomenko
10.3897/j.moem.9.4.116552
12-12-2023
Unique: 988 | Total: 1296
| Access Period:
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177-184
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