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Author

Askar A. Rezvanov

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Short Communication

Simulation of time to failure of porous dielectric in advanced topology integrated circuit metallization system

Andrey A. Orlov, Askar A. Rezvanov

10.3897/j.moem.8.3.98145

20-10-2022

Unique: 1193 | Total: 1604

Reprint: € 5,00

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