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Pavel S. Vergeles
Institute of Microelectronics Technology and High-Purity Materials of the Russian Academy of Sciences, Chernogolovka, Russia
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1 article by this author
Research Article
Effect of low-energy electron irradiation on voltage-capacity curves of Al/SiO
2
/Si structure
Yuriy O. Kulanchikov
,
Pavel S. Vergeles
,
Eugene B. Yakimov
Part of: Physical characteristics and their study
10.3897/j.moem.5.4.52311
31-12-2019
Unique: 306 | Total: 404
Reprint: € 2,60
175-179
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