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  • ContentsContents
  • Article InfoArticle Info
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  • Article title
  • Abstract
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  • 1. Introduction
  • 2. Structural defect base getters
    • 2.1 Extrinsic getters
    • 2.2 Intrinsic getters
    • 2.3 Dislocation generation
  • 3. Gas phase base getters
  • 4. Gettering in chlorine-containing atmosphere with HCl addition
  • 5. Gettering in CCl4 (C2HCl3) base chlorine-containing atmosphere
  • 6. Generation/Recombination center transformation mechanisms
  • 7. Conclusion
  • References
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