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Modern Electronic Materials 10(3)
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Growth chamber gas dynamics in Cz silicon ...
Research Article
Growth chamber gas dynamics in Cz silicon single crystal growth process
    Nataliya A. Verezub,     Anatoly I. Prostomolotov
Part of: Simulation of processes and materials
10.3897/j.moem.10.3.140627
 14-10-2024
 Unique: 1114 | Total: 1493
 Reprint: € 6,00
 185-193
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