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Modern Electronic Materials 7(1)
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Methods of trichlorosilane synthesis ...
Review Article
Methods of trichlorosilane synthesis for polycrystalline silicon production. Part 1: Direct synthesis
Vladimir N. Jarkin, Oleg A. Kisarin, Tatyana V. Kritskaya
Part of: Materials science and technology. Semiconductors
10.3897/j.moem.7.1.64953
 30-03-2021
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