Modern Electronic Materials 6

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Modern Electronic Materials 6(2) (2020)

Epitaxial layers and multilayer compositions

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Research Article

Optimization of passivation in AlGaN/GaN heterostructure microwave transistor fabrication by ICP CVD

Anastasia A. Sleptsova, Sergey V. Chernykh, Dmitry A. Podgorny, Ilya A. Zhilnikov

Part of: Epitaxial layers and multilayer compositions

10.3897/j.moem.6.2.58860

15-07-2020

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