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Tatyana V. Kritskaya
4 articles by this author
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Review Article
Methods of trichlorosilane synthesis for polycrystalline silicon production. Part 2: Hydrochlorination and redistribution
Vladimir N. Jarkin, Oleg A. Kisarin, Tatyana V. Kritskaya
10.3897/j.moem.7.2.65572
 30-06-2021
 Unique: 649 | Total: 1062  | Access Period:
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 33-43
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Review Article
Methods of trichlorosilane synthesis for polycrystalline silicon production. Part 1: Direct synthesis
Vladimir N. Jarkin, Oleg A. Kisarin, Tatyana V. Kritskaya
10.3897/j.moem.7.1.64953
 30-03-2021
 Unique: 804 | Total: 1180  | Access Period:
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 1-10
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Research Article
Potential of using inert gas flows for controlling the quality of as-grown silicon single crystal
Tatyana V. Kritskaya, Vladimir N. Zhuravlev, Vladimir S. Berdnikov
10.3897/j.moem.6.1.53248
 30-03-2020
 Unique: 967 | Total: 1461  | Access Period:
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 1-7
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Research Article
Possible causes of electrical resistivity distribution inhomogeneity in Czochralski grown single crystal silicon
    Svetlana P. Kobeleva, Ilya M. Anfimov, Vladimir S. Berdnikov, Tatyana V. Kritskaya
10.3897/j.moem.5.1.46315
 01-03-2019
 Unique: 976 | Total: 1851  | Access Period:
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 27-32
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