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Author

Dmitry A. Podgorny

National University of Science and Technology MISiS
Moscow, Russia

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Research Article

Optimization of passivation in AlGaN/GaN heterostructure microwave transistor fabrication by ICP CVD

Anastasia A. Sleptsova, Sergey V. Chernykh, Dmitry A. Podgorny, Ilya A. Zhilnikov

10.3897/j.moem.6.2.58860

15-07-2020

Unique: 1337 | Total: 2037

Reprint: € 5,10

71-75

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