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Evgenia V. Sokolova

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Research Article

Basic approaches to simulation of resist mask formation in computational lithography

Nikita N. Balan, Vladidmir V. Ivanov, Alexey V. Kuzovkov, Evgenia V. Sokolova, Evgeniy S. Shamin

10.3897/j.moem.6.1.55056

30-03-2020

Unique: 1194 | Total: 1916

Reprint: € 3,60

37-45

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