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Evgenia V. Sokolova
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1 article by this author
Research Article
Basic approaches to simulation of resist mask formation in computational lithography
Nikita N. Balan
,
Vladidmir V. Ivanov
,
Alexey V. Kuzovkov
,
Evgenia V. Sokolova
,
Evgeniy S. Shamin
Part of: Physical characteristics and their study
10.3897/j.moem.6.1.55056
30-03-2020
Unique: 249 | Total: 343
Reprint: € 3,60
37-45
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