Articles by Author

Author

Evgenia V. Sokolova

1 article by this author

Sort by:

Research Article

Basic approaches to simulation of resist mask formation in computational lithography

Nikita N. Balan, Vladidmir V. Ivanov, Alexey V. Kuzovkov, Evgenia V. Sokolova, Evgeniy S. Shamin

10.3897/j.moem.6.1.55056

30-03-2020

Unique: 1564 | Total: 2585

Reprint: € 3,60

37-45

This website uses cookies in order to improve your web experience. Read our Cookies Policy

OK

web
statistics