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Alexey V. Kuzovkov
1 article by this author
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Research Article
Basic approaches to simulation of resist mask formation in computational lithography
Nikita N. Balan
,
Vladidmir V. Ivanov
,
Alexey V. Kuzovkov
,
Evgenia V. Sokolova
,
Evgeniy S. Shamin
10.3897/j.moem.6.1.55056
30-03-2020
Unique: 2739 | Total: 4211
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37-45
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