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Dmitry V. Irzhak
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Short Communication
Study of the effect of local photon annealing on stress in silicon wafers
Vitaliy V. Starkov
,
Ekaterina A. Gosteva
,
Dmitry V. Irzhak
,
Dmitry V. Roshchupkin
10.3897/j.moem.5.52500
12-09-2019
Unique: 1661 | Total: 2473
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141-144
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