Articles by Author

Author

Kira L. Еnisherlova

J&C «S&PE «Pulsar»
Moscow, Russia

2 articles by this author

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Research Article

Effect of PECVD SiN_x deposition process parameters on electrical properties of SiN_x/AlGaN/GaN structures

Kira L. Enisherlova, Lev A. Seidman, Ella M. Temper, Yuliy A. Kontsevoy

10.3897/j.moem.7.2.73293

30-06-2021

Unique: 1717 | Total: 2567

Reprint: € 6,30

63-71

Research Article

Physicochemical fundamentals of phase formation in silicon layers implanted with oxygen and carbon

Andrey N. Aleshin, Kira L. Enisherlova

10.3897/j.moem.5.2.51365

01-06-2019

Unique: 1325 | Total: 2033

Reprint: € 6,30

77-85

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