Multi-angle spectrophotometry as a tool for determination of film parameters on single-layer structures


	Light reflection measurement data for 10 deg incidence angle on specimen taken at (1) fused quartz substrate side and (2) film side.

Part of: Kozlova NS, Levashov EA, Kiryukhantsev-Korneev PV, Sytchenko AD, Zabelina EV (2022) Multi-angle spectrophotometry as a tool for determination of film parameters on single-layer structures. Modern Electronic Materials 8(2): 51-57. https://doi.org/10.3897/j.moem.8.2.84239