Multi-angle spectrophotometry as a tool for determination of film parameters on single-layer structures


	(1, 3 and 5) Transmittance and (2 and 4) reflectance spectra of (3 and 4) typical structure, (1 and 2) substrate and (5) film.

Part of: Kozlova NS, Levashov EA, Kiryukhantsev-Korneev PV, Sytchenko AD, Zabelina EV (2022) Multi-angle spectrophotometry as a tool for determination of film parameters on single-layer structures. Modern Electronic Materials 8(2): 51-57. https://doi.org/10.3897/j.moem.8.2.84239