Yuze Zhang, Xin Peng, Hu Liu, Dong Xue, Weimin Zhong (2024)
Optimal Control of a Chemical Vapor Deposition Reactor for Polysilicon Production Based on Adaptive Dynamic Programming Method.
Proceedings of the 2024 2nd International Conference on Frontiers of Intelligent Manufacturing and Automation
: 338.
DOI: 10.1145/3704558.3705524
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