Basic schematic of SiH2Cl2–SiCl4 mixture conversion reactor [43]: (1) disproportioning reactor, (2) reactor cross-section and reaction pipes, (3, 4) top and bottom reactor heads, (5) input, (6) SiH2Cl2 + SiCl4 reaction mixture pipeline, (7) static mixer, (8) recirculation pipe, (9) reaction piping cooling enclosure, (10, 11) top and bottom sieves, (12, 13) cooling mixture input and output, (14) recirculation pump, (15, 16) control valves.

 
 
  Part of: Jarkin VN, Kisarin OA, Kritskaya TV (2021) Methods of trichlorosilane synthesis for polycrystalline silicon production. Part 2: Hydrochlorination and redistribution. Modern Electronic Materials 7(2): 33-43. https://doi.org/10.3897/j.moem.7.2.65572