Tetrachlorosilane to trichlorosilane converter: (a) converter general appearance: (1) heater, (2) heated heat exchanger; (b) evaporator to converter reactant flow diagram: (1) evaporator, (2) converter, (3, 4) liquid SiCl4, and H2 directed from evaporator to converter, (5) vapor/gas SiCl4 and H2 mixture at converter input, (6) heated converted vapor/gas SiHCl3, SiCl4, SiH2Cl2 and HCl mixture at converter output, (7) evaporator-cooled SiHCl3, SiCl4, SiH2Cl2 and HCl mixture, (8, 9) converter enclosure water coolant input and output, (10, 11) converter electrode water coolant input and output; (c) graphite heater. Source: http://www.silicon-products-GmbH.com