Methods of trichlorosilane synthesis for polycrystalline silicon production. Part 2: Hydrochlorination and redistribution

Vladimir N.  Jarkin; Oleg A.  Kisarin; Tatyana V. Kritskaya

doi:10.3897/j.moem.7.2.65572

Review Article

Modern Electronic Materials 7(2): 33-43
https://doi.org/10.3897/j.moem.7.2.65572 (30 Jun 2021)

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