Effect of mechanical treatment type on the strength of undoped single crystal indium antimonide wafers


	Surface profile obtained with a profilometer.

Part of: Kormilitsina SS, Molodtsova EV, Knyzev SN, Kozlov RYu, Zavrazhin DA, Zharikova EV, Syrov YuV (2020) Effect of mechanical treatment type on the strength of undoped single crystal indium antimonide wafers. Modern Electronic Materials 6(4): 147-153. https://doi.org/10.3897/j.moem.6.4.64991