Methods of trichlorosilane synthesis for polycrystalline silicon production. Part 1: Direct synthesis


	Use of different crystalline silicon types in photovoltaic converter technologies [4].

Part of: Jarkin VN, Kisarin OA, Kritskaya TV (2021) Methods of trichlorosilane synthesis for polycrystalline silicon production. Part 1: Direct synthesis. Modern Electronic Materials 7(1): 1-10. https://doi.org/10.3897/j.moem.7.1.64953