Methods of trichlorosilane synthesis for polycrystalline silicon production. Part 1: Direct synthesis

Vladimir N. Jarkin; Oleg A. Kisarin; Tatyana V. Kritskaya

doi:10.3897/j.moem.7.1.64953

Review Article

Modern Electronic Materials 7(1): 1-10
https://doi.org/10.3897/j.moem.7.1.64953 (30 Mar 2021)

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