Methods of trichlorosilane synthesis for polycrystalline silicon production. Part 1: Direct synthesis

Vladimir N. Jarkin; Oleg A. Kisarin; Tatyana V. Kritskaya

doi:10.3897/j.moem.7.1.64953

Review Article

Modern Electronic Materials 7(1): 1-10
https://doi.org/10.3897/j.moem.7.1.64953 (30 Mar 2021)

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DOI: 10.1016/j.cej.2022.138020

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Fe2O3-modified CuO catalyst for efficient catalytic silicon hydrochlorination to trichlorosilane: Catalyst structural evolution. Applied Catalysis A: General 664: 119327.

DOI: 10.1016/j.apcata.2023.119327

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DOI: 10.3390/pr12091911

Ye Wan, Jianhua Liu, Qiuyun Mao, Xin Chang, Ying Song, Zhenjun Yuan, Zihan You, Xiong Zhao, Jiazhuang Tian, Dazhou Yan, Jin Xiao, Qifan Zhong (2022)
Exploration of Photocatalytic Chlorination Combined Simplified Distillation to Produce Electronic Grade High-Purity Trichlorosilane Via Microchannel Reactor Experiments, Multiphase-Flow Simulation, Reaxff Md, and Dft. SSRN Electronic Journal : .

DOI: 10.2139/ssrn.4098345

Alexander G. Sturm, Uhut S. Karaca, Myron Heinz, Thorsten Felder, Kenrick M. Lewis, Norbert Auner, Max C. Holthausen (2023)
Siemens Reloaded: Chloride‐Assisted Selective Hydrodechlorination of SiCl4 to HSiCl3. ChemSusChem 16: .

DOI: 10.1002/cssc.202201953

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