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Review Article
Modern Electronic Materials 7(1): 1-10
https://doi.org/10.3897/j.moem.7.1.64953 (30 Mar 2021)
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  • 1. Introduction
    • 1.1. General
    • 1.2. Production of photovoltaic converters
    • 1.3. Polycrystalline silicon market situation
  • 2. Trichlorosilane synthesis
    • 2.1. General
    • 2.2. Trichlorosilane synthesis by direct chlorination or direct synthesis
    • Effect of silicon impurity composition
    • Effect of silicon pretreatment on its reactivity
    • Effect of temperature and pressure on the reactivity of silicon
    • Effect of gas atmosphere composition delivered to reactor
    • Effect of catalysts
    • Effect of reactor design
  • References
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