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Histograms of distribution of piezoresponse signals for LiNbO3/SiOx/Si (line 1) and LiNbO3/Pt/Si (line 2) heterostructures [14]. |
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| Part of: Zhukov RN, Kushnerev K.S, Kiselev DA, Ilina TS, Kubasov IV, Kislyuk AM, Malinkovich MD, Parkhomenko YN (2020) Enhancement of piezoelectric properties of lithium niobate thin films by different annealing parameters. Modern Electronic Materials 6(2): 47-52. https://doi.org/10.3897/j.moem.6.2.54295 |