Enhancement of piezoelectric properties of lithium niobate thin films by different annealing parameters

Roman N. Zhukov; K.S. Kushnerev; Dmitry A. Kiselev; Tatiana S.  Ilina; Ilya V. Kubasov; Alexander M. Kislyuk; Mikhail D. Malinkovich; Yuri N. Parkhomenko

doi:10.3897/j.moem.6.2.54295

Research Article

Modern Electronic Materials 6(2): 47-52
https://doi.org/10.3897/j.moem.6.2.54295 (30 Jun 2020)

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