Effect of low-energy electron irradiation on voltage-capacity curves of Al/SiO2/Si structure


	C–V curve variation for different irradiation doses: (1) before irradiation and (2–5) irradiation with doses of 10, 20, 25 and 30 µCl.

Part of: Kulanchikov YO, Vergeles PS, Yakimov EB (2019) Effect of low-energy electron irradiation on voltage-capacity curves of Al/SiO₂/Si structure. Modern Electronic Materials 5(4): 175-179. https://doi.org/10.3897/j.moem.5.4.52311