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Phosphorus diffusion coefficient distribution in depth: (1) Sauer–Freise method; (2) coordinate dependent diffusion method. Arrows are the direction of the electric field vector of the p-n junctions. |
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| Part of: Kobeleva SP, Anfimov IM, Turutin AV, Yurchuk SYu, Fomin VM (2018) Coordinate dependent diffusion analysis of phosphorus diffusion profiles in gallium doped germanium. Modern Electronic Materials 4(3): 113-117. https://doi.org/10.3897/j.moem.4.3.39536 |