|
||
|
(1) experimental phosphorus profile in germanium and (2) fourth power polynomial approximation. |
|
||||||||
| Part of: Kobeleva SP, Anfimov IM, Turutin AV, Yurchuk SYu, Fomin VM (2018) Coordinate dependent diffusion analysis of phosphorus diffusion profiles in gallium doped germanium. Modern Electronic Materials 4(3): 113-117. https://doi.org/10.3897/j.moem.4.3.39536 |