Research Article
Other versions:
- ContentsContents
- Article InfoArticle Info
- CiteCite
- MetricsMetrics
- CommentComment
- RelatedRelated
- FigsFigs
- RefsRefs
- CitedCited
-
Article title
-
Abstract
-
Keywords
-
1. Introduction
-
2. Structural defect base getters
-
2.1 Extrinsic getters
-
2.2 Intrinsic getters
-
2.3 Dislocation generation
-
-
3. Gas phase base getters
-
4. Gettering in chlorine-containing atmosphere with HCl addition
-
5. Gettering in CCl4 (C2HCl3) base chlorine-containing atmosphere
-
6. Generation/Recombination center transformation mechanisms
-
7. Conclusion
-
References