Research Article
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Article title
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Abstract
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Keywords
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1. Introduction
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2. Structural defect base getters
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2.1 Extrinsic getters
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2.2 Intrinsic getters
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2.3 Dislocation generation
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3. Gas phase base getters
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4. Gettering in chlorine-containing atmosphere with HCl addition
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5. Gettering in CCl4 (C2HCl3) base chlorine-containing atmosphere
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6. Generation/Recombination center transformation mechanisms
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7. Conclusion
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References