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  • Article title
  • Abstract
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  • 1. Introduction
  • 2. Experimental
    • 2.1. III–V single crystal surface oxidation level evaluation method
    • 2.2. Chemical bond ionicity evaluation
  • 3. Results and discussion
    • 3.1. Natural oxidation
    • 3.2. Oxidation due to chemical-mechanical polishing
  • 4. Conclusion
  • Acknowledgements
  • References
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